產(chǎn)品詳情
|
Wafer?Size:? |
200mm |
|
Cassette?Pick-up?Position:? |
909mm?(35.8?inches) |
|
Cassette?Positioning:? |
To?within?±0.005?inches?(vertical) |
|
SMIF-Pod?Load?Height: |
900mm?(35.5?inches) Nominal |
|
Maximum?Reach?of?Load?Arm: (Measured?from?front?face?of?LPT?to H-bar?of?SMIF-Pod) |
307mm?(12.10?inches) Reversed?Cassette?Orientation |
|
Height:? |
1578mm?(62.13?inches) |
|
Width:? |
457mm?(18.00?inches) |
|
Depth:? |
478mm?(18.81?inches) |
|
Weight: (Without?SMIF-Pod,?cassette,?wafers) |
170?pounds(77.27kg) |
|
Speed?of?travel?(Minienvironment):? |
57.2mm?(2.25?inches)?per?second |
|
Mounting:? |
Tool?mount.?May?make?use?of?an?interface?frame?calibrated?to?lock?the?LPT?into?a?repeatable?b?onto?the?Process?Tool. |
|
Power:? |
3.5?Amp?(100-120vac) 2?Amp?(230vac) |
|
Laser NOTE:LPT?is?a?Class?I?Laser?product when?used?with?a?SMIF-Pod |
Diode?Laser;?Wavelength?=?670?nm Laser?Power?=?<1mW?(Class?II) |
|
Communications:? |
Serial?RS-232C?(SECS?I?/?SECS?II),?RS-485?(optional),?Bi-directional?Parallel?LAN
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